SPTS Technologies designs, manufactures, sells, and supports etch, PVD, CVD and thermal capital equipment and process technologies for the global semiconductor and micro-device industries, with focus on the MEMS, advanced packaging, LED, high speed RF device and power management markets. The solutions offered by SPTS include market-leading silicon etch, dielectric etch, dry-release etch, PVD, PECVD, APCVD and large batch vertical furnaces, available with a range of wafer-handling options applicable to R&D, pilot production, or volume production environments.
Silicon DRIE systems
Compound Semiconductor and Oxide etching systems
Silicon oxide sacrificial layer etching systems
Plasma Enhanced CVD systems
Physical Vapour Deposition systems
Thermal batch processing systems (LPCVD/APCVD)